Semiconductor device

ABSTRACT

A semiconductor device includes an intellectual property (IP) block, a clock management unit, a critical path monitor (CPM), and a CPM clock manager included in the clock management unit. The clock management unit is configured to receive a clock request signal, indicating whether the IP block requires a clock signal, from the IP block and perform clock gating for the IP block based on the received clock request signal. The CPM is configured to monitor the clock signal provided to the IP block to adjust at least one of a frequency of the clock signal provided to the IP block and a voltage supplied to the IP block. The CPM clock manager is configured to perform the clock gating for the CPM.

This application is a continuation of U.S. application Ser. No.18/099,077, filed Jan. 19, 2023, which is a continuation of U.S.application Ser. No. 17/372,122, filed Jul. 9, 2021, now U.S. Pat. No.11,592,861, and a claim of priority under 35 U.S.C. § 119 is made toKorean Patent Application No. 10-2020-0100969 filed on Aug. 12, 2020, inthe Korean Intellectual Property Office and from Korean PatentApplication No. 10-2021-0072230 filed on Jun. 3, 2021, in the KoreanIntellectual Property Office, the disclosures of which are incorporatedherein by reference in their entireties.

BACKGROUND 1. Field of the Disclosure

The present disclosure relates to a semiconductor device.

2. Description of the Related Art

With the increases in integration degree, size, and operating speed ofsemiconductor devices, a low power consumption issue has become a veryimportant factor. This is because high power consumption may cause atemperature rise of a chip to cause not only malfunction of the chip butalso the breakage of a package.

In semiconductor circuits of semiconductor devices, sometimes, there isa need for a circuit for providing or blocking a clock for the purposeof reducing power. A clock gating circuit is used so that a clock is notprovided to a specific circuit when the circuit does not need tooperate.

In addition, in order to reduce power consumption of semiconductordevices, a dynamic voltage frequency scaling (DVFS) technique forchanging an operation clock frequency in a chip or changing a magnitudeof a supplied driving voltage is also used.

In a clock gating technique, a clock is cut off to reduce powerconsumption, but in a DVFS technique, a clock, which is to be monitoredand of which a frequency is to be changed, is always required.Therefore, research is being conducted to effectively use bothtechniques.

SUMMARY

Aspects of the present disclosure provide a semiconductor device havingreduced power consumption.

It should be noted that objects of the present disclosure are notlimited to the above-described objects, and other objects of the presentdisclosure will be apparent to those skilled in the art from thefollowing descriptions.

According to some embodiments, a semiconductor device includes anintellectual property (IP) block; a clock management unit configured toreceive a clock request signal, indicating whether the IP block requiresa clock signal, from the IP block and configured to perform clock gatingfor the IP block based on the received clock request signal; a criticalpath monitor (CPM) configured to monitor the clock signal provided tothe IP block to adjust at least one of a frequency of the clock signalprovided to the IP block and a voltage supplied to the IP block; and aCPM clock manager included in the clock management unit and configuredto perform the clock gating for the CPM.

According to some embodiments, a semiconductor device includes aprocessor; a clock generator configured to output a clock signalprovided to the processor, a CPM configured to monitor the clock signalprovided to the processor to adjust at least one of a frequency of theclock signal provided to the processor and a voltage supplied to theprocessor; and a CPM clock manager configured to receive a signal forrequesting to stop provision of the clock signal from the processor andthen perform clock gating for the CPM in response to the receivedsignal.

According to some embodiments, a semiconductor device includes an IPblock; a first clock component configured to receive a first requestsignal, indicating whether the IP block requires a clock signal, fromthe IP block and configured to provide a first clock signal to the IPblock based on the received request signal; a second clock componentconfigured to receive a second request signal, indicating whether the IPblock requires the clock signal, from the first clock component andconfigured to provide a second clock signal to the first clock componentbased on the received second request signal, and a CPM configured tomonitor the clock signal provided to the IP block to adjust at least oneof a frequency of the clock signal provided to the IP block and avoltage supplied to the IP block. After a signal is received from the IPblock requesting a discontinuation of the first clock signal, the firstclock component transmits a third request signal, which indicates a stoprequest for the second clock signal, to the CPM in response to thereceived signal.

Specific details of other exemplary embodiments are contained in thefollowing detailed description and accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other aspects and features of the present disclosure willbecome more apparent by describing exemplary embodiments thereof indetail with reference to the attached drawings, in which:

FIG. 1 is a block diagram illustrating a semiconductor device(system-on-chip) according to some embodiments;

FIG. 2 is a block diagram illustrating a clock management unit includedin a semiconductor device according to some embodiments;

FIG. 3 is a diagram for describing an implementation method of a clockmultiplexer (MUX) unit included in a semiconductor device according tosome embodiments;

FIG. 4 is a diagram for describing a finite state machine (FSM) of aclock MUX unit included in a semiconductor device according to someembodiments;

FIG. 5 is a diagram for describing an implementation method of a clockgating unit included in a semiconductor device according to someembodiments;

FIG. 6 is a diagram for describing a structure of a clock gating unitincluded in a semiconductor device according to some embodiments;

FIG. 7 is a timing diagram for describing a behavior of a clock gatingunit included in a semiconductor device according to some embodiments;

FIG. 8 is a block diagram illustrating an intellectual property (IP)block included in a semiconductor device according to some embodiments;

FIG. 9 is a diagram illustrating a signal transmission path between aplurality of clock control circuits;

FIG. 10 is a conceptual diagram illustrating the operation of a dynamicvoltage frequency scaling (DVFS) block;

FIG. 11 is a timing diagram illustrating the operation of a DVFS block;

FIGS. 12 and 13 are diagrams for describing the operations of a criticalpath monitor (CPM) clock manager and a CPM;

FIG. 14 is a diagram illustrating a structure of a CPM according to someembodiments;

FIG. 15 is an exemplary block diagram of a calibration delay circuit ofFIG. 14 ;

FIG. 16 is an exemplary block diagram of a NAND delay circuit of FIG. 14;

FIG. 17 is an exemplary block diagram of a wire delay circuit of FIG. 14;

FIG. 18 is an exemplary block diagram of an edge detector of FIG. 14 ;

FIG. 19 is an exemplary block diagram of a post processor of FIG. 14 ;

FIG. 20 is a timing diagram for describing an operation method of a CPM;

FIG. 21 is a block diagram illustrating a clock management unit includedin a semiconductor device according to some other exemplary embodiments:

FIG. 22 is a block diagram illustrating a clock management unit includedin a semiconductor device according to some other exemplary embodiments;and

FIG. 23 is a block diagram illustrating a clock management unit includedin a semiconductor device according to some other exemplary embodiments.

DETAILED DESCRIPTION OF THE EMBODIMENTS

Hereinafter, exemplary embodiments according to the technical spirit ofthe present disclosure will be described with reference to theaccompanying drawings.

FIG. 1 is a block diagram illustrating a semiconductor device(system-on-chip) according to some embodiments.

Referring to FIG. 1 , a semiconductor device 1 according to someembodiments may include a clock management unit (CMU) 100, first andsecond intellectual property (IP) blocks 200 and 210, a power managementunit (PMU) 300, a dynamic voltage frequency scaling (DVFS) block 400,and a clock generator 500.

The CMU 100 may generate operation clock signals to be provided to thefirst and second IP blocks 200 and 210. For example, the CMU 100 maygenerate a first operation clock signal OCLK1 necessary for theoperation of the first IP block 200 and a second operation clock signalOCLK2 necessary for the operation of the second IP block 210.

The first and second IP blocks 200 and 210 may be connected to a systembus and may communicate with each other through the system bus. In someembodiments, the first and second IP blocks 200 and 210 may eachinclude, for example, a processor, a graphic processor, a memorycontroller, an input and output interface block, and the like, butexemplary embodiments are not limited thereto. In addition, in someembodiments, the first and second IP blocks 200 and 210 may includeprocessors having different computational throughputs, such as a bigcore and a little core.

Although only an example of the two IP blocks 200 and 210 areillustrated in the drawing, exemplary embodiments are not limitedthereto, and the number of the IP blocks included in the semiconductordevice 1 may be implemented differently as needed.

At least one of the first and second IP blocks 200 and 210 may transmita clock request signal to the CMU 100 according to a full handshakemethod.

For example, the first IP block 200 may transmit a first clock requestsignal REQ1 to the CMU 100 according to the full handshake method. TheCMU 100 may receive the first clock request signal REQ1 and may transmita first clock response signal ACK1 to the first IP block 200. Inaddition, at the same time, the CMU 100 may transmit the first operationclock signal OCLK1 to the first IP block 200.

For example, the second IP block 210 may transmit a second clock requestsignal REQ2 to the CMU 100 according to the full handshake method. TheCMU 100 may receive the second clock request signal REQ2 and maytransmit a second clock response signal ACK2 to the second IP block 210.In addition, at the same time, the CMU 100 may transmit the secondoperation clock signal OCLK2 to the second IP block 210.

In some embodiments, an interface between the CMU 100 and the first andsecond IP blocks 200 and 210 may have a type of full handshake method.In some embodiments, such an interface may be implemented to follow aQ-channel interface or P-channel interface of the ARM Company, but theexemplary embodiments are not limited thereto.

Clock gating is a function of dividing the inside of a computer systeminto small functional blocks and cutting off power to unused parts.Since all parts of a computer system do not always operate when acomputer is actually used, blocks in unused parts may be stopped toreduce power consumption and also to reduce heat generated in blockswhose functions are stopped.

When there is an IP block that does not require an operation clock amongthe first IP block 200 and the second IP block 210, the CMU 100 mayperform sequential clock gating to automatically perform clock gatingwithout generating an error in the operation of the IP block that doesnot require an operation clock, thereby reducing power consumption.

The PMU 300 controls a voltage supplied to the semiconductor device 1.For example, when the semiconductor device 1 enters a standby mode, thePMU 300 may turn a power adjustment circuit off to cut off a supplyvoltage supplied to the semiconductor device 1. In this case, the PMU300 may continuously consume power, but since the power consumed by thePMU 300 corresponds to a very small portion of power consumed by theentire semiconductor device 1, in the standby mode, power consumption ofthe semiconductor device 1 can be greatly reduced.

Specifically, when the semiconductor device 1 is in a standby mode, thePMU 300 may cut off power supplied to the CMU 100. However, this maycorrespond to a case in which there is no clock request from the firstand second IP blocks 200 and 210.

The DVFS block 400 may perform a DVFS operation on the first IP block200 and the second IP block 210. In some embodiments, the DVFS block 400may perform a closed loop DVFS operation on the first IP block 200 andthe second IP block 210.

Specifically, the DVFS block 400 may monitor clock signals provided tothe first IP block 200 and the second IP block 210 through an innerloop, and if necessary, the DVFS block 400 may adjust frequencies of theclock signals provided to the first IP block 200 and the second IP block210.

In addition, the DVFS block 400 may monitor voltages supplied to thefirst IP block 200 and the second IP block 210 through an outer loop,and if necessary, the DVFS block 400 may adjust the voltages supplied tothe first IP block 200 and the second IP block 210.

Herein, although the DVFS block 400 for performing the DVFS operation onthe first IP block 200 and the second IP block 210 is separatelyillustrated for convenience of description, unlike what is illustrated,the DVFS block 400 may not be implemented separately from CMU 100, thePMU 300, the clock generator 500, and like. In some embodiments, atleast some or all components of the CMU 100, the PMU 300, and the clockgenerator 500 may be included in the DVFS block 400.

For such an operation, the DVFS block 400 may include a critical pathmonitor (CPM) 410. For example, in order to perform a DVFS operation onthe first IP block 200, the CPM 410 may monitor a clock signal providedto the first IP block 200. That is, the CPM 410 may monitor a clockprovided to the first IP block 200 to adjust a frequency of the firstoperation clock signal OCLK1 provided to the first IP block 200.

In some embodiments, in order to perform a DVFS operation on the secondIP block 210, the CPM 410 may monitor a clock signal provided to thesecond IP block 210. That is, the CPM 410 may monitor a clock providedto the second IP block 210 to adjust a frequency of the second operationclock signal OCLK2 provided to the second IP block 210.

Although only one CPM 410 is illustrated in the drawing, exemplaryembodiments are not limited thereto. In some embodiments, the DVFS block400 may include a first CPM for monitoring a clock provided to the firstIP block 200 to adjust a frequency of the first operation clock signalOCLK1 provided to the first IP block 200 and a second CPM for monitoringa clock provided to the second IP block 210 to adjust a frequency of thesecond operation clock signal OCLK2 provided to the second IP block 210.That is, an independent CPM may also be disposed for each IP block.

In some embodiments, the DVFS block 400 may include as many CPMs as thenumber of the IP blocks included in the semiconductor device 1. That is,when n IP blocks are disposed in the semiconductor device 1, the DVFSblock 400 may also include n CPMs (wherein n is a natural number).

The clock generator 500 may generate a clock signal necessary for theoperation of the semiconductor device 1. Hereinafter, an example inwhich the clock generator 500 is a phase lock loop (PLL) will bedescribed, but the exemplary embodiments are not limited thereto. Clocksignals generated by the PLL 500 may be provided to the CMU 100 andprovided to the first and first IP blocks 200 and 210.

FIG. 2 is a block diagram illustrating a CMU included in a semiconductordevice (system-on-chip) according to some embodiments.

Referring to FIG. 2 , a CMU 100 includes clock components 120 a, 120 b,120 c, 120 d, 120 e, 120 f, and 120 g, channel management circuits (CMs)130 and 132, a CMU controller 110, and CPM clock manager 140 a.

The clock components 120 a, 120 b, 120 c, 120 d, 120 e, 120 f, and 120 ggenerate clock signals to be provided to IP blocks 200 and 210, and theCMs 130 and 132 are disposed between the clock components 120 f and 120g and the IP blocks 200 and 210 to provide communication channels CHbetween the CMU 100 and the IP blocks 200 and 210. The CMU controller110 provides clock signals to the IP blocks 200 and 210 using the clockcomponents 120 a, 120 b, 120 c, 120 d, 120 e, 120 f, and 120 g.

In some embodiments, the communication channels CH provided by the CMs130 and 132 may be implemented to follow a low power interface (LPI), aQ-channel interface, or a P-channel interface of the ARM Company, butthe exemplary embodiments are not limited thereto.

The clock components 120 a, 120 b, 120 c, 120 d, 120 e, 120 f, and 120 grespectively include clock sources (CSs) 124 a, 124 b, 124 c, 124 d, 124e, 124 f, and 124 g and clock control circuits (CCs) 122 a, 122 b, 122c, 122 d, 122 e, 122 f, and 122 g for respectively controlling the CSs124 a, 124 b, 124 c, 124 d, 124 e, 124 f, and 124 g.

Here, the CSs 124 a, 124 b, 124 c, 124 d, 124 e, 124 f, and 124 g mayinclude, for example, a multiplexer circuit (MUX circuit), a clockdividing circuit, a short stop circuit, a clock gating circuit, and thelike.

The clock components 120 a, 120 b, 120 c, 120 d, 120 e, 120 f, and 120 gform a parent-child relationship with each other. In the illustratedexample, the clock component 120 a is a parent of the clock component120 b, and the clock component 120 b is a child of the clock component120 a and a parent of the clock component 120 c. In addition, the clockcomponent 120 e is a parent of two clock components 120 f and 120 g, andthe clock components 120 f and 120 g are children of the clock component120 e.

Meanwhile, in the present exemplary embodiment, the clock component 120a disposed closest to a PLL 500 is a root clock component, and the clockcomponents 120 f and 120 g disposed closest to the IP blocks 200 and 210are leaf clock components.

Such a parent-child relationship is also inevitably formed between theCCs 122 a, 122 b, 122 c, 122 d, 122 e, 122 f, and 122 g and between theCSs 124 a, 124 b, 124 c, 124 d, 124 e, 124 f, and 124 g according to theparent-child relationship between the clock components 120 a, 120 b, 120c, 120 d, 120 e, 120 f, and 120 g.

The CCs 122 a, 122 b, 122 c, 122 d, 122 e, 122 f, and 122 g transmit andreceive a clock request signal REQ and an acknowledgment signal ACK forthe clock request signal REQ between the parent and the child andprovide operation clock signals OCLK1 and OCLK2 to the IP blocks 200 and210.

For example, when the IP block 200 does not require a first operationclock signal OCLK1, for example when the IP block 200 needs to enter asleep state, the CMU 100 stops providing the first operation clocksignal OCLK1 to the IP block 200.

Specifically, under control of the CMU 100 or the CMU controller 110,the CM 130 transmits a first signal, which indicates a stop request forprovision of the first operation clock signal OCLK1, to the IP block200.

The IP block 200 receiving the first signal transmits, after a task thatis being processed is completed, a second signal, which indicates thatthe clock signal may be stopped, to the CM 130. After receiving thesecond signal from the IP block 200, the CM 130 requests the clockcomponent 120 f corresponding to a parent thereof to stop providing theclock signal.

For example, when the communication channel CH provided by the CM 130follows a Q-channel interface, the CM 130 transmits a QREQn signalhaving a first logical value (for example, a logic low, hereinafterdenoted by L) to the IP block 200 as the first signal. Then, afterreceiving a QACCEPTn signal having, for example, the first logical valueL, from the IP block 200 as the second signal, the CM 130 transmits theclock request signal REQ having, for example, the first logical value L,to the clock component 120 f. In this case, the clock request signal REQhaving the first logical value L means a “clock provision stop request.”

The CC 122 f, which receives the clock request signal REQ having thefirst logical value L, that is, a clock provision stop request from theCM 130, disables the CS 124 f (for example, a clock gating circuit) tostop providing the first operation clock signal OCLK1. Accordingly, thefirst IP block 200 may enter a sleep mode.

In such a process, the CC 122 f may provide the acknowledgement signalACK having the first logical value L to the CM 130. Here, even when theCM 130 transmits the clock provision stop request REQ having the firstlogical value L and then receives the acknowledgement signal ACK havingthe first logical value L, it is not ensured that provision of a clockfrom the CS 124 f is stopped.

The acknowledgment signal ACK only means that the CC 122 f recognizesthat the clock component 120 f, which is a parent of the CM 130, nolonger needs to provide the first operation clock signal OCLK1 to the IPblock 200.

Meanwhile, the CC 122 f of the clock component 120 f transmits the clockrequest signal REQ having the first logical value L to the CC 122 e ofthe clock component 120 e corresponding to a parent thereof.

When the IP block 210 also does not require a clock signal, for example,when the CC 122 e receives a clock provision stop request from the CC122 g, the CC 122 e disables the CS 124 e (for example, a clock dividingcircuit) to stop providing a clock signal.

Such an operation may be similarly performed for other CCs 122 a, 122 b,122 c, and 122 d.

Alternatively, although the CC 122 f of the clock component 120 ftransmits the clock request signal REQ having the first logical value Lto the CC 122 e of the clock component 120 e corresponding to the parentthereof, when the IP block 210 is in a running state or an active state,the CC 122 e cannot disable the CS 124 e.

Thereafter, only when the IP block 210 no longer requires a clocksignal, may the CC 122 e disable the CS 124 e and transmit the clockrequest signal REQ having the first logical value L to the CC 120 dcorresponding to a parent thereof. That is, the CC 122 e may disable theCS 124 e only when a clock provision stop request is received from boththe CCs 122 f and 122 g corresponding to children thereof.

Meanwhile, when the IP block 200 is in a sleep state, all of the CSs 124a, 124 b, 124 c, 124 d, 124 e, and 124 f are disabled, and then, whenthe IP block 200 enters a running state or an active state, the CMU 100resumes providing a clock signal to the IP block 200.

The CMU 130 transmits the clock request signal REQ having a secondlogical value (for example, a logic high, hereinafter denoted by H) tothe CC 122 f of the clock component 120 f corresponding to the parentthereof and waits for the acknowledgment signal ACK from the CC 122 f.Here, the clock request signal REQ having the second logical value Hmeans a “clock provision request,” and the acknowledgment signal ACK forthe clock provision request means that provision of a clock from the CS124 f is resumed. The CC 122 f does not immediately enable the CS 124 f(for example, the clock gating circuit) but waits for a clock signal tobe provided from a parent.

Next, the CC 122 f transmits the clock request signal REQ having thesecond logical value H, that is, a clock provision request, to the CC122 e corresponding to the parent thereof and waits for theacknowledgment signal ACK from the CC 122 e. Such an operation may besimilarly performed for the CCs 122 a, 122 b, 122 c, and 122 d.

The CC 122 a, which is a root clock component receiving the clockrequest signal REQ having the second logical value H from the CC 122 b,enables the CS 124 a (for example, a MUX circuit) and transmits theacknowledgment signal ACK to the CC 122 b. When the CSs 124 b, 124 c,124 d, 124 d, and 124 e are sequentially enabled in such a manner, theCC 122 e finally transmits the acknowledgment signal ACK, whichindicates that provision of a clock from the CS 124 e is resumed, to theCC 122 f. The CC 122 f receiving the acknowledgment signal ACK finallyenables the CS 124 f to provide the operation clock signal OCLK1 to theIP block 200 and transmits the acknowledgment signal ACK to the CM 130.

As described above, the CCs 122 a, 122 b, 122 c, 122 d, 122 e, 122 f,and 122 g operate in a full handshake method in which the clock requestsignal REQ and the acknowledgment signal ACK for the clock requestsignal REQ are transmitted and received between a parent and a child.Accordingly, the CCs 122 a, 122 b, 122 c, 122 d, 122 e, 122 f, and 122 gmay control the CSs 124 a, 124 b, 124 c, 124 d, 124 e, 124 f, and 124 gin a hardware manner to control the operation clock signal OCLK1provided to the IP block 200.

The CCs 122 a, 122 b, 122 c, 122 d, 122 e, 122 f, and 122 g mayself-operate to transmit the clock request signal REQ to the parent orcontrol the CSs 124 a, 124 b, 124 c, 124 d, 124 e, 124 f, and 124 g andmay also operate under control of the CMU controller 110.

Meanwhile, in some embodiments, the CCs 122 a, 122 b, 122 c, 122 d, 122e, 122 f, and 122 g may include a finite state machine (FSM) whichcontrols each of the CS 124 a, 124 b, 124 c, 124 d, 124 e, 124 f, and124 g according to the clock request signal REQ transmitted and receivedbetween a parent and a child.

In some embodiments, the clock component 120 a may be, for example, aPLL controller which provides a control signal CTL to the PLL 500 tocontrol an output clock signal PLLCK of the PLL 500.

The PLL controller may receive a constant or variable frequency signaloscillated from an oscillator (OSC) and may operate to automaticallyturn the PLL 500 off when a component using a PLL output is not present.Alternatively, when the component using the PLL output is not present,the PLL controller may operate to automatically switch the PLL 500 intoa bypass mode. Alternatively, when the component using the PLL output isnot present, the PLL controller may have no effect on the operation ofthe PLL 500.

The PLL controller may be implemented as any component that generates aclock. For example, the PLL controller may be implemented using a ringOSC or may be implemented using a crystal OSC.

In some embodiments, the clock component 120 b may be, for example, aclock MUX unit.

The clock MUX unit may include the CC 122 b and a MUX circuit 124 b, andthe CC 122 b of the clock MUX unit may operate with sequential behavior.

The CC 122 b may control turn-on/off of a clock and may autonomouslygenerate a clock request signal for changing a MUX selection of the MUXcircuit 124 b in a state in which the clock is turned off. The clockrequest signal autonomously generated by the CC 122 b for changing theMUX selection may be supplied only to a previous parent clock componentand a subsequent parent clock component or may be supplied to allpossible parent clock components. Alternatively, the CC 122 b may notgenerate autonomously the clock request signal for changing the MUXselection.

FIG. 3 is a diagram for describing an implementation method of a clockMUX unit included in a semiconductor device according to someembodiments, and FIG. 4 is a diagram for describing an FSM of a clockMUX unit included in a semiconductor device according to someembodiments.

Referring to FIG. 3 , the clock MUX unit includes an FSM and a MUXcircuit SEC_AP_RTL_GFMUX. The FSM receives a clock request signalCHILD_CLK_REQ through an adapter Adapter_CLKGATE from a child clockcomponent and transmits clock request signals PARENT_CLK_REQ 0 andPARENT_CLK_REQ 1 to a parent clock component.

In this case, the clock MUX unit may include a glitch-free MUX. A glitchrefers to a temporary malfunction of a computer caused by a noise pulsegenerated in an unnecessary part.

When the FSM receives a selection signal SEL and confirms that a valueof the selection signal SEL is changed, the FSM compares the selectionsignal SEL with a muxsel signal MUXSEL and then checks whether values ofthe selection signal and the muxsel signal MUXSEL are the same.

When the values of the selection signal SEL and the muxsel signal MUXSELare not the same, the FSM generates a detect change signal. Here, aprocess of generating the detect change signal may be performed bytoggling a value of the detect change signal having a low state into ahigh state or toggling a value of the detect change signal having a highstate into a low state.

In response to a selection signal SEL_OUT output from the FSM, the clockMUX unit outputs a first clock signal CLK1 or a second clock signal CLK2output from a CC (not shown) different from a CC 122 a (see FIG. 2 ) asa clock signal CLK_OUT. In this case, a child clock component 120 c (seeFIG. 2 ) receives the clock signal CLK_OUT.

Referring to FIG. 4 together, the FSM included in the clock MUX unit mayinclude the following states.

A first state b1 is a state in which clock gating by hardware operatesand is a state in which both of a parent clock component (of the clockMUX unit) stopping the provision of a clock to a child clock componentand a parent clock component (of the clock MUX unit) still operating toprovide a clock may be present. In this state, it is not ensured thatall parent clock components of the clock MUX unit are operating. Thatis, the state may be a state in which the operation of an unnecessaryparent clock component is stopped and power consumption is minimized.Accordingly, the clock MUX unit cannot perform a task of changing aselection according to the selection signal SEL. Unlike a clock gatingcomponent, the clock MUX unit may maintain an optimized state even whena clock request signal is received from a child clock component.

A second state b2 is a state in which, since the clock MUX unit needs tochange a selection according to the selection signal SEL, all parentclock components of the clock MUX unit are woken up.

A third state b3 is a state in which clock gating by hardware does notoperate. That is, the third state b3 is a state in which all parentclock components are woken up and a clock signal is being provided tothe clock MUX unit. In such an operation, the clock MUX unit may changea selection according to the selection signal SEL.

A fourth state b4 is a state in which, after the clock MUX unit changesa selection according to the selection signal SEL, clock gating byhardware operates again, and thus, a parent clock component, which doesnot need to provide a clock, starts to stop the operation thereof. Thatis, the fourth state b4 is a state in which a clock stop request signalis transmitted to the parent clock component that does not need toprovide a clock.

After a clock response signal is received from the parent clockcomponent that does not need to provide a clock, a state may return tothe first state b1.

Referring again to FIG. 2 , in some embodiments, a clock component 120 cand a clock component 120 e may be, for example, clock dividing units.Hereinafter, an example of the clock component 120 c will be described,and the same may be applied to the clock component 120 e.

The clock dividing unit may include a CC 122 c and a clock source 124c(i.e. dividing circuit), and the CC 122 c of the clock dividing unitmay operate with sequential behavior. The CC 122 c may controlturn-on/off of a clock and may autonomously generate a clock requestsignal to change a clock dividing ratio of the clock dividing circuit ina state in which the clock is turned off. The CC 122 c may notautonomously generate a clock request signal to change a clock dividingratio of the clock source 124 c in a state in which a clock is turnedoff.

In some embodiments, a clock component 120 d may be, for example, ashort stop unit.

The short stop unit may include a CC 122 d and a clock source 124 d(i.e. clock gating circuit), and the CC 122 d of the short stop unit mayoperate with sequential behavior. The CC 122 d may control turn-on/offof a clock. When a clock request signal from a child clock component isdeactivated, the CC 122 d may activate the clock source 124 d.

In some embodiments, clock components 120 f and 120 g may be, forexample, clock gating units.

The clock gating unit may communicate with at least one of CMs 130 and132 according to a full handshake method.

FIG. 5 is a diagram for describing an implementation method of a clockgating unit included in a semiconductor device according to someembodiments. FIG. 6 is a diagram for describing a structure of a clockgating unit included in a semiconductor device according to someembodiments. FIG. 7 is a timing diagram for describing a behavior of aclock gating unit included in a semiconductor device according to someembodiments.

Referring to FIG. 5 , the clock gating unit includes an FSM and a clockgating cell SEC_AP_RTL_CLKGATE. Here, the FSM means a computationalmodel or machine including a finite number of states and transformationsbetween the states. The FSM and the clock gating cell SEC_AP_RTL_CLKGATEof FIG. 5 may correspond to an adapter and a core clock gating cellSEC_AP_RTL_CLKGATE of FIG. 6 , respectively. Here, the FSM or theadapter may operate in response to a reference clock signal CLK_RFcorresponding to a different clock domain from a clock signal CLKgenerated by a clock component and may perform a full handshake with theclock gating cell SEC_AP_RTL_CLKGATE.

The FSM may receive a clock request signal CHILD_CLK_REQ received from achild clock component and may transmit a clock request signalPARENT_CLK_REQ to a parent clock component or output an enable signal ENfor controlling the clock gating cell SEC_AP_RTL_CLKGATE according to astate of the FSM.

The clock gating cell SEC_AP_RTL_CLKGATE receives a clock signal CLK_INaccording to the enable signal EN output from the FSM and outputs aclock signal CLK_OUT in which the clock signal CLK_IN is gated orbypassed.

Referring to FIG. 7 , the FSM of the clock gating unit may include thefollowing states.

A first state a1 is a state in which, according to a clock requestsignal CHILD_CLK_REQ having a second logical value H received from achild clock component, a clock signal CLK is provided to the child clockcomponent without performing a clock gating operation. Thereafter, theclock request signal CHILD_CLK_REQ received from the child clockcomponent transitions to a first logical value L.

A second state a2 is a state in which the clock gating unit performs aself-clock gating operation. Accordingly, after self-local handshakelatency necessary for the self-clock gating operation elapses, the clockgating unit transmits a clock response signal CHILD_CLK_ACK having thefirst logical value L to the child clock component. In addition, theclock gating unit transmits a clock request signal PARENT_CLK_REQ havingthe first logical value L to a parent clock component.

A third state a3 corresponds to an operation in which the clock requestsignal PARENT_CLK_REQ having the first logical value L is transmitted tothe parent clock component to transmit a clock provision stop request. Afourth state a4 is a state in which the clock gating unit waits untilthe clock response signal PARENT_CLK_ACK having the first logical valueL for the parent clock component is received from the parent clockcomponent. Since the clock gating unit internally completes a gatingoperation, when the parent clock component needs to perform a clockgating operation, this means that the parent clock component performsthe clock gating operation.

After the clock response signal PARENT_CLK_ACK having the first logicalvalue L for the parent clock component is received from the parent clockcomponent, in a fifth state a5, provision of a clock to the child clockcomponent of the clock gating unit is completely stopped.

In this case, when the clock request signal CHILD_CLK_REQ having thesecond logical value H is received from the child clock component, afterthe clock request signal PARENT_CLK_REQ having the second logical valueH is transmitted to the parent clock component, in a sixth state a6, theclock gating unit stops the self-clock gating operation.

After a local handshake latency necessary to stop the self-clock gatingoperation elapses, when the clock response signal PARENT_CLK_ACK havingthe second logical value H is received from the parent clock component,the clock gating unit enters a seventh state a7, and here, the seventhstate a7 means the first state a1.

Referring to FIGS. 1 and 2 , a PMU 300 may transmit a power controlsignal to an oscillator in response to a wake-up signal input in astandby mode. The oscillator is an oscillation circuit that generates aconstant frequency signal and provides an operation clock to a logicblock. A commonly used crystal oscillator uses a piezoelectric vibrationof a crystal to generate a stable and accurate frequency signal.

When power is input to the OSC, while oscillation starts, a stableoscillation clock is gradually output from a fine and unstable signal.After the oscillation clock output from the OSC is stabilized, a CMU 100may provide an operation clock to a logic block.

FIG. 8 is a block diagram illustrating an IP block included in asemiconductor device according to some embodiments.

Referring to FIG. 8 , an IP block 200 may include a channel adapter 202and an IP core 204. FIG. 8 illustrates only an example of the IP block200, and the other IP block 210 includes substantially the samecomponents.

Referring to FIGS. 1, 2, and 8 , the channel adapter 202 may communicatewith a CM 130 according to a full handshake method. Through the channeladapter 202, the IP block 200 may transmit a first clock request signalREQ1 and receive a first operation clock signal OCLK1. Alternatively,through the channel adapter 202, the IP block 200 may transmit the firstclock request signal REQ1 and receive an acknowledgment signal ACKindicating that a clock is present, and the first operation clock signalOCLK1 may be provided directly from a clock component controlled by thechannel adapter 202.

The IP core 204 may include, for example, a processor, a graphicprocessor, a memory controller, an input and output interface block, andthe like.

FIG. 9 is a diagram illustrating a signal transmission path between aplurality of CCs.

Referring to FIG. 9 , the plurality of CCs may operate using handshakesignals including a clock request signal REQ and an acknowledgmentsignal ACK (or a clock response signal) that is a response signal forthe clock request signal REQ. The clock request signal REQ and the clockresponse signal ACK may have, for example, a first logical value L and asecond logical value H, but a method of implementing the clock requestsignal REQ and the clock response signal ACK is not limited thereto.

In some embodiments, for example, a clock consumer may transmit theclock request signal REQ having the second logical value H to a clockprovider to transmit information, which indicates that a clock isrequired, to the clock provider. Alternatively, for example, the clockconsumer may transmit the clock request signal REQ having the firstlogical value L to the clock provider to transmit information, whichindicates that a clock is no longer required, to the clock provider.

Meanwhile, for example, the clock provider may transmit the clockresponse signal ACK having the second logical value H to the clockconsumer, which indicates that a clock signal is stably supplied to theclock consumer from the clock provider. Therefore, the clock providermay transmit the clock response signal ACK having the first logicalvalue L to the clock consumer, which indicates that the clock providercannot inform the clock consumer of whether the clock signal isprovided.

For example, a CC 122 b as a clock consumer may transmit, for example, aclock request signal PARENT_CLK_REQ having the second logical value H toa CC 122 a, thereby transmitting information, which indicates that aclock is required, to the CC 122 a corresponding to the clock provider.Thus, a clock component (that is, a clock provider) including the CC 122a provides a clock signal to a clock component (that is, a clockconsumer) including the CC 122 b, and then, the CC 122 b may receive,for example, a clock response signal PARENT_CLK_ACK having the secondlogical value H from the CC 122 a.

Meanwhile, the CC 122 b as a clock provider may receive a clock requestsignal CHILD_CLK_REQ having the second logical value H from a CC 122 f,thereby knowing that the CC 122 f corresponding to a clock consumerrequires a clock. Accordingly, a clock component (that is, a clockprovider) including the CC 122 b may provide a clock signal to a clockcomponent (that is, a clock consumer) including the CC 122 f, and then,the CC 122 b as the clock provider may transmit, for example, a clockresponse signal CHILD_CLK_ACK having the second logical value H to theCC 122 f.

As another example, the CC 122 b as a clock consumer may transmit, forexample, the clock request signal PARENT_CLK_REQ having the firstlogical value L to the CC 122 a, thereby transmitting information, whichindicates that a clock is no longer required, to the CC 122 acorresponding to a clock provider. Accordingly, the CC 122 b mayreceive, for example, the clock response signal PARENT_CLK_ACK havingthe first logical value L from the CC 122 a, which indicates thatprovision of a clock from a clock provider is not ensured.

Meanwhile, the CC 122 b as a clock provider may receive, for example,the clock request signal CHILD_CLK_REQ having the first logical value Lfrom the CC 122 f, thereby knowing that the CC 122 f corresponding to aclock consumer no longer requires a clock. Accordingly, the CC 122 b maytransmit, for example, the clock response signal CHILD_CLK_ACK havingthe first logical value L to the CC 122 f, which indicates thatprovision of a clock from a clock provider is not ensured.

Here, a combination path between the CCs includes a path through whichthe CC 122 b transmits the clock request signal PARENT_CLK_REQ to the CC122 a corresponding to a parent thereof, and then the CC 122 b receivesthe clock response signal PARENT_CLK_ACK from the CC 122 a correspondingto the parent thereof and a path through which the CC 122 b receives theclock request signal CHILD_CLK_REQ from the CC 122 f corresponding to achild thereof, and then the CC 122 b transmits the clock response signalCHILD_CLK ACK to the CC 122 f corresponding to the child thereof.However, the combination path between the CCs does not include a paththrough which the CC 122 b receives the clock response signalPARENT_CLK_ACK from the CC 122 a corresponding to the parent thereof,and then the CC 122 b transmits the clock request signal PARENT_CLK_REQto the CC 122 a corresponding to the parent thereof (shown as “X” inFIG. 9 ).

The clock request signal REQ and the clock response signal ACK areimplemented in a general full handshake method, and a clock provider anda clock consumer may belong to the same single clock domain and maybelong to different clock domains.

In some embodiments of the present disclosure, a clock MUX circuit, aclock dividing circuit, a clock gating circuit, or the like which isconnected to and communicates with each CC may use a clock domaindifferent from that of the CC. That is, a clock frequency of a signalline for transmitting a clock request signal may be different from aclock frequency of an actually received operation clock.

Referring to FIGS. 1, 2 and 9 , a full handshake method is summarized asfollows.

When an IP block 200 requires a clock, the IP block 200 activates afirst clock request signal REQ1. For example, the IP block 200 may makethe first clock request signal REQ1 into a high state.

A CMU 100 activates a first clock response signal ACK1 for the firstclock request signal REQ1 in response to the activation of the firstclock request signal REQ1. That is, the CMU 100 may make the first clockresponse signal ACK1 into a high state.

The CMU 100 may transmit a first operation clock signal OCLK1 to the IPblock 200 before the first clock response signal ACK1 is activated.Alternatively, the CMU 100 may transmit the first clock signal OCLK1 tothe IP block 200 simultaneously with the activation of the first clockresponse signal ACK1.

When the IP block 200 does not require a clock, the first clock requestsignal REQ1 is deactivated. That is, the IP block 200 may make the firstclock request signal REQ 1 into a low state.

When the first clock request signal REQ1 is in a low state, the CMU 100makes the first clock response signal ACK1 into a low state. The CMU 100may deactivate the first operation clock signal OCLK1 at the same time.

The IP block 200 may operate normally while the first clock responsesignal ACK1 is in an active state.

Furthermore, each of CCs 122 a, 122 b, 122 c, 122 d, 122 e, 122 f, and122 g may also perform communication according to a full handshakemethod. For example, each of the CCs 122 a and 122 b may support a fullhandshake method between a clock component 120 a that is a PLLcontroller and a clock component 120 b that is a clock MUX unit.

Each of the CCs 122 b and 122 c may support a full handshake methodbetween, for example, the clock component 120 b that is the clock MUXunit and a clock component 120 c that is a first clock dividing unit.

Each of the CCs 122 c and 122 d may support a full handshake methodbetween, for example, the clock component 120 c that is the first clockdividing unit and a clock component 120 d that is a short stop circuit.

Each of the CCs 122 d and 122 e may support a full handshake methodbetween, for example, the clock component 120 d that is the short stopcircuit and a clock component 120 e that is a second clock dividingunit.

Each of the CCs 122 e and 122 f may support a full handshake methodbetween, for example, the clock component 120 e that is the second clockdividing unit and a clock component 120 f that is a first clock gatingunit.

Similarly, each of the CCs 122 f and a CM 130 may support a fullhandshake method between, for example, the clock component 120 f that isthe first clock gating unit and the CM 130.

In some embodiments, each of the clock components 120 a, 120 b, 120 c,120 d, 120 e, 120 f, and 120 g and CMs 130 and 132 may be implemented asa combinational circuit. Thus, an activated clock request signal can betransmitted from the CMs 130 and 132 to the clock component 120 a, whichis, for example, a PLL controller.

Referring again to FIG. 2 , a DVFS block 400 may perform a DVFSoperation on IP blocks 200 and 210 using a CPM 410.

FIG. 10 is a conceptual diagram illustrating the operation of a DVFSblock. FIG. 11 is a timing diagram illustrating the operation of a DVFSblock.

Referring to FIG. 10 , the DVFS block may include a hardware block 400 aimplemented as hardware and a software block 400 b implemented assoftware.

A CPM 410 and a PLL 500 may constitute an inner loop IL.

In the inner loop IL, for each period of the inner loop IL, the CPM 410may monitor an operating speed of a circuit. A monitoring result of theCPM 410 may be fed back to the PLL 500 for each period of the inner loopIL to change a frequency of a clock.

Hereinafter, a configuration in which the CPM 410 changes a frequency ofa clock using the PLL 500 for each inner loop period will be described.

Referring to FIGS. 2, 10, and 11 , the CPM 410 may monitor a clocksignal CLK1 provided to an IP block for each inner loop period (innerloop #1, #2, #3, #4, or the like of FIG. 11 ) to generate a code CODE1related to an operating speed of a circuit.

The code CODE1 may be provided to a clock component 120 a which controlsthe PLL 500, and when a frequency of a PLL output clock signal PLLCK ofthe PLL 500 needs to be changed according to the code CODE1, the clockcomponent 120 a may generate a control signal CTL related thereto toapply the generated control signal CTL to the PLL 500 so that thefrequency of the PLL output clock signal PLLCK of the PLL 500 may bechanged. As described above, when the frequency of the PLL output clocksignal PLLCK of the PLL 500 is changed, both of a frequency of theoutput clock signal CLK1 of the clock component 120 a and frequencies ofoutput clock signals CLK of clock components 120 b, 120 c, 120 d, and120 e may be changed, and thus, finally, a frequency of an operationclock signal OCLK1 provided to an IP block 200 may also be changed.

The CPM 410, the PLL 500, a frequency monitor 450, a target frequencydetermination module 460, a voltage determination module 470, a voltageregulator 310, and the like may constitute an outer loop OL.

Referring to FIGS. 10 and 11 , the operation of the outer loop OL may beperformed for a period (see t1, t2, or t3 of FIG. 11 ) that is longerthan the inner loop period. That is, a plurality of inner loopoperations may be performed within one period of the outer loop OL.

The inner loop operation may be performed a plurality of times at anaverage frequency AF as a target until a time point t1, and at the timepoint t1, when the voltage determination module 470 determines a supplyvoltage of a next period based on outputs of the frequency monitor 450and the target frequency determination module 460, the voltage regulator310 may change a voltage to change the supply voltage. Accordingly,after the time point t1, a voltage reduced by a voltage AV from thatbefore the time point t1 may be supplied.

Thereafter, the inner loop operation may be performed a plurality oftimes at an average frequency BF as a target until a time point t2, andat the time point t2, when the voltage determination module 470determines a supply voltage of a next period based on outputs of thefrequency monitor 450 and the target frequency determination module 460,the voltage regulator 310 may change a voltage to change the supplyvoltage. Accordingly, after the time point t2, a voltage reduced oncemore by the voltage AV from that before the time point 2 may besupplied.

Next, when a voltage droop occurs while the inner loop operation isperformed a plurality of times until a time point t3, the inner loopchanges a clock frequency to compensate for the voltage droop. Then, atthe time point t3, when the voltage determination module 470 determinesa supply voltage of a next period based on outputs of the frequencymonitor 450 and the target frequency determination module 460, thevoltage regulator 310 may change a voltage to the supply voltage.Accordingly, after the time point t3, a voltage increased by a voltageBV from that before the time point t3 may be provided to compensate forthe voltage droop.

The operation of the outer loop OL may be newly set for each period T.That is, a new DVFS level may be set for each period T.

In some embodiments, an operation period of the outer loop OL may belonger than an operation period of the inner loop IL, and a period atwhich the DVFS level is newly set may be longer than the operationperiod of the outer loop OL.

The operations of the CPM 410 and the IP block 200, for example, theoperation of the DVFS block 400 has been described above, but the CPM410 and an IP block 210 may also operate in the same manner.

Referring to FIG. 2 , a CPM clock manager 140 a may perform clock gatingfor a CPM 410.

In some embodiments, the CPM clock manager 140 a may be implemented in aform similar to the clock components 120 a, 120 b, 120 c, 120 d, 120 e,120 f, and 120 g described above. That is, the CPM clock manager 140 amay include a CC and a CS.

The CPM clock manager 140 a may form a clock chain as illustratedtogether with the clock components 120 a, 120 b, 120 c, 120 d, 120 e,120 f, and 120 g.

The CPM clock manager 140 a may provide the clock signal CLK1 outputfrom the clock component 120 a to the CPM 410. In this case, the CS ofthe CPM clock manager 140 a may provide the clock signal CLK1 outputfrom the clock component 120 a to the CPM 410 without separatelyprocessing the clock signal CLK1 output from the clock component 120 a.

The CPM clock manager 140 a may transmit a request signal REQ, whichindicates a stop request for provision of the clock signal CLK1, to theCPM 410 under control of a CMU 100 or a CMU controller 110.

The CPM 410 receiving the request signal REQ transmits, after a taskthat is being processed is completed, a response signal ACK, whichindicates that the clock signal may be stopped, to the CPM clock manager140 a. After receiving the response signal ACK from the CPM 410, the CPMclock manager 140 a requests a clock component corresponding to a parentthereof (the clock component 120 a in the present example) to stopprovision of the clock signal.

FIGS. 12 and 13 are diagrams for describing the operations of a CPMclock manager and a CPM.

First, referring to FIGS. 2 and 12 , a clock component 120 b, which is achild, transmits a clock request signal CLK_REQ for requesting to stop aclock signal to a CPM clock manager 140 a, which is a parent ({circlearound (1)}). This may be because, for example, an IP block 200 hasrequested a clock signal stop so as to enter a sleep mode. Accordingly,the CPM clock manager 140 a may know that the IP block 200 has requestedthe clock signal stop through the clock component 120 b.

As described, when the IP block 200 enters the sleep mode, monitoring ofthe IP block 200 is not required. Accordingly, the CPM clock manager 140a transmits the request signal REQ, which indicates a stop request forprovision of the clock signal, to the CPM 410 ({circle around (2)}).

Referring to FIG. 13 , in some embodiments, the CPM clock manager 140 amay provide, for example, a clock stop request signal CPM_DOWN_REQnhaving a first logical value L to the CPM 410.

Referring to FIGS. 12 and 13 , the CPM 410 receiving the clock stoprequest signal CPM_DOWN_REQn having the first logical value L performs aclean-up operation of completing a task that is being processed ({circlearound (3)}).

Specifically, the CPM 410 may stop the operation of a pattern generatordisposed therein and may flush a previously generated code or the liketo the outside.

In some embodiments, the CPM clock manager 140 a may provide a clocksignal CLK1 to the CPM 410 until the clean-up operation of the CPM 410is fully completed. In addition, in some embodiments, the CPM clockmanager 140 a may provide the clock signal CLK1 to the CPM 410 while theCPM 410 maintains an active state which is an active signal CPM_ACTIVEmaintains a second logical value H. Furthermore, in some other exemplaryembodiments, until a certain time point after providing, for example,the clock stop request signal CPM_DOWN_REQn having the first logicalvalue L, the CPM clock manager 140 a may provide the clock signal CLK1to the CPM 410.

In the present exemplary embodiment, even if the clock signal CLK1 isnot provided to the CPM 410, the CPM 410 is not disabled. As illustratedin FIG. 13 , the CPM 410 continuously maintains an enabled state by anenable signal CPM_ENABLE, but a clock signal CPM Clock necessary for amonitoring operation of the CPM 410 is not provided.

When the clean-up operation is fully completed, the CPM 410 transmits anacknowledgment signal ACK, which indicates that the clean-up operationis completed, to the CPM clock manager 140 a ({circle around (4)}).

Referring to FIG. 13 , in some embodiments, the CPM 410 may provide, forexample, a clock stop request signal CPM_DOWN_ACKn having the firstlogical value L to the CPM clock manager 140 a.

The CPM clock manager 140 a receiving a response signal ACK from the CPM410 transmits the clock request signal CLK_REQ for requesting to stop aclock signal to a clock component 120 a that is a parent ({circle around(5)}).

In a semiconductor device 1 according to the present exemplaryembodiment, during a section in which, since a clock signal is notprovided to the IP block 200 according to such an operation, the CPM 410does not need to operate (that is, a section in which the CPM 410 doesnot need to perform monitoring), provision of a clock signal to the CPM410 is stopped, thereby effectively reducing power consumption during anoperation of the semiconductor device.

Although only the operations of one CPM 410 and one CPM clock manager140 a have been described above, exemplary embodiments are not limitedthereto. In some embodiments, a DVFS block 400 may include a first CPMfor monitoring a clock provided to a first IP block 200 to adjust afrequency of a first operation clock signal OCLK1 provided to the firstIP block 200 and a second CPM for monitoring a clock provided to asecond IP block 210 to adjust a frequency of a second operation clocksignal OCLK2 provided to the second IP block 210. The exemplaryembodiment may be modified such that a CMU 100 also includes a first CPMclock manager for performing clock gating for the first CPM and a secondCPM clock manager for performing clock gating for the second CPM.

FIG. 14 is a diagram illustrating a structure of a CPM according to someembodiments. FIG. 15 is an exemplary block diagram of a calibrationdelay circuit of FIG. 14 . FIG. 16 is an exemplary block diagram of aNAND delay circuit of FIG. 14 . FIG. 17 is an exemplary block diagram ofa wire delay circuit of FIG. 14 . FIG. 18 is an exemplary block diagramof an edge detector of FIG. 14 . FIG. 19 is an exemplary block diagramof a post processor of FIG. 14 . FIG. 20 is a timing diagram fordescribing an operation method of a CPM.

Referring to FIG. 14 , a CPM 410 may include a pattern generator PG,first and second delay groups DG0 and DG1, an edge detector ED, and apost processor PP.

The CPM 410 may receive a clock signal CLK1 (see FIG. 2 ) from a CMU 100(see FIG. 2 ) and may monitor an operating speed of a semiconductorcircuit based on the received clock signal CLK1.

Referring to FIGS. 14 and 20 , the pattern generator PG may generate apattern signal A (see FIG. 18 ) based on a received clock signal CLK.The pattern signal A generated from the pattern generator PG may beprovided to the edge detector ED.

The first delay group DG0 may perform a first delay on the patternsignal A generated from the pattern generator PG, and the second delaygroup DG1 may perform a second delay on an output of the first delaygroup DG0 to provide a delayed pattern signal B to the edge detector ED.

In some embodiments, the first delay group DG0 and the second delaygroup DG1 may include substantially the same components. Accordingly,the description of the first delay group DG0, which will be describedbelow, may be equally applied to the second delay group DG1.

The first delay group DG0 may include a first delay chain SLDC0, asecond delay chain LDC0, a third delay chain RDC0, and a fourth delaychain WDC0.

In some embodiments, transistors constituting the first delay chainSLDC0, the second delay chain LDC0, and the third delay chain RDC0 mayhave different threshold voltages.

For example, the threshold voltage of the transistor constituting thefirst delay chain SDLC0 may be lower than the threshold voltage of thetransistor constituting the second delay chain LDC0. In addition, thethreshold voltage of the transistor constituting the second delay chainLDC0 may be lower than the threshold voltage of the transistorconstituting the third delay chain RDC0.

In some embodiments, the transistors having the different thresholdvoltages may be formed by applying different impurity concentrations tosources and drains of the transistors. That is, for example, theimpurity concentration of the source and drain of the transistorconstituting the first delay chain SLDC0 may be applied to be differentfrom the impurity concentration of the source and drain of thetransistor constituting the second delay chain LDC0, and the impurityconcentration of the source and drain of the transistor constituting thesecond delay chain LDC0 may be applied to be different from the impurityconcentration of the source and the drain of the transistor constitutingthe third delay chain RDC0, thereby implementing the transistors so asto have different threshold voltages. However, exemplary embodiments arenot limited thereto, and a method of implementing the transistors so asto have different threshold voltages is not limited thereto.

Referring to FIGS. 14 and 15 , each of the first delay chain SLDC0, thesecond delay chain LDC0, and the third delay chain RDC0 may include acalibration delay circuit CD.

The calibration delay circuit CD may include a first delay cell DECELL1including a plurality of inverters INV and a second delay cell DECELL2including a plurality of inverters INV. An output of the first delaycell DECELL1 may be selected by a first selection MUX SEMUX1 andtransferred to the second delay cell DECELL2. An output of the seconddelay cell DECELL2 may be selected by a second selection MUX SEMUX2 andtransferred to the outside.

The calibration delay circuit CD may serve to adjust an amount of acalibration delay to calibrate a value of a code CODE1 (see FIG. 2 )generated by the CPM 410.

Referring to FIG. 14 , an output of the calibration delay circuit CD maybe provided to a NAND delay circuit NAND2, a NOR delay circuit NOR2, aninverter delay circuit INV, and a wire delay circuit wire.

Referring to FIGS. 14 and 16 , the NAND delay circuit NAND2 may includea delay cell including a plurality of NAND gates NAND, a NOR gate NOR,and an inverter INV. The NOR gate NOR may be inserted to preventtoggling that may occur inside the NAND delay circuit NAND2 when theNAND delay circuit NAND2 is disabled. A dummy NAND gate DNAND of theNAND delay circuit NAND2 may be inserted to increase load capacitance.

Referring to FIGS. 14 and 17 , the wire delay circuit wire may include aNOR gate NOR, an OR gate OR, an inverter INV, a MUX, and a plurality ofwire delay lines.

Referring to FIG. 14 , in some embodiments, the CPM 410 may activate anyone of the first delay chain SLDC0, the second delay chain LDC0, thethird delay chain RDC0, and the fourth delay chain WDC0 included in thefirst delay group DG0 through a predetermined control signal.

Referring to FIGS. 14 and 20 , for example, when an IP block 200 (seeFIG. 2 ) operates in a first state, the CPM 410 may perform a firstdelay on the pattern signal A generated from the pattern generator PGthrough the first delay chain SLDC0 to provide the pattern signal A tothe NOR gate NOR. In addition, when the IP block 200 (see FIG. 2 )operates in a second state, the CPM 410 may perform a first delay on thepattern signal A generated from the pattern generator PG through thesecond delay chain LDC0 to provide the pattern signal A to the NOR gateNOR. Furthermore, when the IP block 200 (see FIG. 2 ) operates in athird state, the CPM 410 may perform a first delay on the pattern signalA generated from the pattern generator PG through the third delay chainRDC0 to provide the pattern signal A to the NOR gate NOR. In addition,when the IP block 200 (see FIG. 2 ) operates in a fourth state, the CPM410 may perform a first delay on the pattern signal A generated from thepattern generator PG through the fourth delay chain WDC0 to provide thepattern signal A to the NOR gate NOR.

In some embodiments, the CPM 410 may activate the same delay chains inthe first delay group DG0 and the second delay group DG1. For example,when the IP block 200 (see FIG. 2 ) operates in the first state, the CPM410 may perform first and second delays on the pattern signal Agenerated from the pattern generator PG through first delay chains SLDC0and SLDC1 to provide the pattern signal A to the edge detector ED in theform of the delayed pattern signal B. In addition, when the IP block 200(see FIG. 2 ) operates in the second state, the CPM 410 may performfirst and second delays on the pattern signal A generated from thepattern generator PG through second delay chains LDC0 and LDC1 toprovide the pattern signal A to the edge detector ED in the form of thedelayed pattern signal B. Furthermore, when the IP block 200 (see FIG. 2) operates in the third state, the CPM 410 may perform first and seconddelays on the pattern signal A generated from the pattern generator PGthrough third delay chains RDC0 and RDC1 to provide the pattern signal Ato the edge detector ED in the form of the delayed pattern signal B. Inaddition, when the IP block 200 (see FIG. 2 ) operates in the fourthstate, the CPM 410 may perform first and second delays on the patternsignal A generated from the pattern generator PG through fourth delaychains WDC0 and WDC1 to provide the pattern signal A to the edgedetector ED in the form of the delayed pattern signal B.

In some embodiments, the CPM 410 may activate different delay chains inthe first delay group DG0 and the second delay group DG1. For example,when the IP block 200 (see FIG. 2 ) operates in the first state, the CPM410 may perform first and second delays on the pattern signal Agenerated from the pattern generator PG through the first delay chainSLDC0 of the first delay group DG0 and any one of the second delay chainLDC1, the third delay chain RDC1, and the fourth delay chain WDC1 of thesecond delay group DG1 to provide the pattern signal A to the edgedetector ED in the form of the delayed pattern signal B. In addition,when the IP block 200 (see FIG. 2 ) operates in the second state, theCPM 410 may perform first and second delays on the pattern signal Agenerated from the pattern generator PG through the second delay chainLDC0 of the first delay group DG0 and any one of the first delay chainSLDC1, the third delay chain RDC1, and the fourth delay chain WDC1 ofthe second delay group DG1 to provide the pattern signal A to the edgedetector ED in the form of the delayed pattern signal B. Furthermore,when the IP block 200 (see FIG. 2 ) operates in the third state, the CPM410 may perform first and second delays on the pattern signal Agenerated from the pattern generator PG through the third delay chainRDC0 of the first delay group DG0 and any one of the first delay chainSLDC1, the second delay chain LDC1, and the fourth delay chain WDC1 ofthe second delay group DG1 to provide the pattern signal A to the edgedetector ED in the form of the delayed pattern signal B. In addition,when the IP block 200 (see FIG. 2 ) operates in the fourth state, theCPM 410 may perform first and second delays on the pattern signal Agenerated from the pattern generator PG through the fourth delay chainWDC0 of the first delay group DG0 and any one of the first delay chainSLDC1, the second delay chain LDC1, and the third delay chain RDC1 ofthe second delay group DG1 to provide the pattern signal A to the edgedetector ED in the form of the delayed pattern signal B.

Referring to FIGS. 14, 18, and 20 , the edge detector ED includes aplurality of inverters INV, a plurality of flip-flops FF, a plurality ofXNOR gates XNOR, and a plurality of XOR gates XOR.

The delayed pattern signal B generated through the first delay group DG0and the second delay group DG1 is gradually delayed by passing thoughthe inverters INV. n flip-flops FF sequentially latch a delayed signal(wherein n is a natural number) and provide the latched signal to theXNOR gate XNOR or the XOR gate XOR and compare the latched signal withthe pattern signal A generated from the pattern generator PG to generatea raw thermometer code.

For example, referring to FIG. 20 , edge 0 and edge 1 of the patternsignal A are generated from edge 0 and edge 1 of the clock signal CLK.Edge 0 of the delayed pattern signal B is generated from edge 0 of theclock signal CLK using the above-described delay chains.

The flip-flops FF of the edge detector ED sequentially delay and latchedges 0 of the delayed pattern signal B. In the illustrated example,edge 0 of the delayed pattern signal B latched by a (2i−1)^(th)flip-flop FF at a rising edge 1 of a capturing clock capture_CLKprecedes edge 1 of the pattern signal A, but edges 0 of the delayedpattern signal B latched by a (2i)^(th) flip-flop FF and a (2i+1)^(th)flip-flop FF at the rising edge 1 of the capturing clock capture_CLK donot precede edge 1 of the pattern signal A. Accordingly, values of a(2i−1)^(th) bit, a (2i)^(th) bit, and a (2i+1)^(th) bit of the raw codebecome 1, 0, and 0, respectively.

Edge 2 and edge 3 of the pattern signal A are generated from edge 2 andedge 3 of a next clock signal CLK. Edge 2 of the delayed pattern signalB is generated from edge 2 of the clock signal CLK through theabove-described configuration.

The flip-flops FF of the edge detector ED sequentially delay and latchthe edges 2 of the delayed pattern signal B. In the illustrated example,edge 2 of the delayed pattern signal B latched by the (2i−1)^(th)flip-flop FF and edge 2 of the delayed pattern signal B latched by the(2i)^(th) flip-flop FF at a rising edge 3 of the capturing clockcapture_CLK precede edge 3 of the pattern signal A, but edge 2 of thedelayed pattern signal B latched by the (2i+1)^(th) flip-flop FF at therising edge 3 of the capturing clock capture_CLK does not precede edge 3of the pattern signal A. Accordingly, values of the (2i−1)^(th) bit, the(2i)^(th) bit, and the (2i+1)^(th) bit of the raw code become 1, 1, and0, respectively.

In order to increase the accuracy of such edge comparison, the edgedetector ED according to the present exemplary embodiment alternatelyuses the plurality of XNOR gates and the plurality of XOR gates XOR.That is, the delayed pattern signal B latched by the (2i−1)^(th)flip-flop FF is provided to the XNOR gate XNOR and compared with thepattern signal A, and the delayed pattern signal B latched by the(2i)^(th) flip-flop FF is provided to the XOR gate XOR and compared withthe pattern signal A.

Referring to FIGS. 14 and 19 , the post processor PP may receive the rawcode from the edge detector ED and may perform necessary processing onthe raw code.

According to the above-described operation, in the raw code generated bythe edge detector ED, a bit value of 1 should not theoretically appearafter a bit value of 0 appears. However, in an actual operation, anincomplete raw code such as 110100 may be generated for various reasons.The post processor PP performs processing on such an unstable raw codeand then converts the processed unstable raw code into a binary code tooutput the binary code. The output code may be provided to, for example,a clock component 120 a or the like illustrated in FIG. 2 and used tocontrol a PLL 500.

The CPM 410 according to the present exemplary embodiment may monitor anoperating speed of a circuit through such an operation.

FIG. 21 is a block diagram illustrating a CMU included in asemiconductor device according to some other exemplary embodiments.

Hereinafter, descriptions overlapping those of the above-describedexemplary embodiments will be omitted, and differences will be mainlydescribed.

Referring to FIG. 21 , in the present exemplary embodiment, a CPM clockmanager 140 a is implemented between a clock component 120 b and a clockcomponent 120 c.

Specifically, the CPM clock manager 140 a may provide a clock signal CLKoutput from the clock component 120 b to a CPM 410. The CPM clockmanager 140 a may transmit a request signal REQ, which indicates a stoprequest for provision of the clock signal CLK, to the CPM 410 undercontrol of a CMU 100 or a CMU controller 110.

The CPM 410 receiving the request signal REQ transmits, after a taskthat is being processed is completed, a response signal ACK, whichindicates that the clock signal may be stopped, to the CPM clock manager140 a. After receiving the response signal ACK from the CPM 410, the CPMclock manager 140 a may request a clock component corresponding to aparent thereof (for example, the clock component 120 b) to stopprovision of the clock signal.

FIG. 22 is a block diagram illustrating a CMU included in asemiconductor device according to some embodiments.

Hereinafter, descriptions overlapping those of the above-describedexemplary embodiments will be omitted, and differences will be mainlydescribed.

Referring to FIG. 22 , in the present exemplary embodiment, a CPM clockmanager 140 a is implemented between a clock component 120 c and a clockcomponent 120 d.

Specifically, the CPM clock manager 140 a may provide a clock signal CLKoutput from the clock component 120 c to a CPM 410. The CPM clockmanager 140 a may transmit a request signal REQ, which indicates a stoprequest for provision of the clock signal CLK, to the CPM 410 undercontrol of a CMU 100 or a CMU controller 110.

The CPM 410 receiving the request signal REQ transmits, after a taskthat is being processed is completed, a response signal ACK, whichindicates that the clock signal may be stopped, to the CPM clock manager140 a. After receiving the response signal ACK from the CPM 410, the CPMclock manager 140 a may request a clock component corresponding to aparent thereof (for example, the clock component 120 c) to stopprovision of the clock signal.

FIG. 23 is a block diagram illustrating a CMU included in asemiconductor device according to some embodiments.

Hereinafter, descriptions overlapping those of the above-describedexemplary embodiments will be omitted, and differences will be mainlydescribed.

Referring to FIG. 23 , in the present exemplary embodiment, a CPM clockmanager 140 a is implemented between a clock component 120 d and a clockcomponent 120 e.

Specifically, the CPM clock manager 140 a may provide a clock signal CLKoutput from the clock component 120 d to a CPM 410. The CPM clockmanager 140 a may transmit a request signal REQ, which indicates a stoprequest for provision of the clock signal CLK, to the CPM 410 undercontrol of a CMU 100 or a CMU controller 110.

The CPM 410 receiving the request signal REQ transmits, after a taskthat is being processed is completed, a response signal ACK, whichindicates that the clock signal may be stopped, to the CPM clock manager140 a. After receiving the response signal ACK from the CPM 410, the CPMclock manager 140 a may request a clock component corresponding to aparent thereof (for example, the clock component 120 d) to stopprovision of the clock signal.

In the case of the present exemplary embodiment, since the CPM clockmanager 140 a is disposed adjacent to IP blocks 200 and 210, the CPM 410may monitor a clock signal most similar to operation clock signals OCLK1and OCLK2 provided to the IP blocks 200 and 210 so that a DVFS operationcorresponding to an actual operation situation of the IP blocks 200 and210 may be possible.

As is traditional in the field, embodiments may be described andillustrated in terms of blocks which carry out a described function orfunctions. These blocks, which may be referred to herein as units ormodules or the like, are physically implemented by analog and/or digitalcircuits such as logic gates, integrated circuits, microprocessors,microcontrollers, memory circuits, passive electronic components, activeelectronic components, optical components, hardwired circuits and thelike, and may optionally be driven by firmware and/or software. Thecircuits may, for example, be embodied in one or more semiconductorchips, or on substrate supports such as printed circuit boards and thelike. The circuits constituting a block may be implemented by dedicatedhardware, or by a processor (e.g., one or more programmedmicroprocessors and associated circuitry), or by a combination ofdedicated hardware to perform some functions of the block and aprocessor to perform other functions of the block. Each block of theembodiments may be physically separated into two or more interacting anddiscrete blocks without departing from the scope of the disclosure.Likewise, the blocks of the embodiments may be physically combined intomore complex blocks without departing from the scope of the disclosure.An aspect of an embodiment may be achieved through instructions storedwithin a non-transitory storage medium and executed by a processor.

Although the exemplary embodiments of the present disclosure have beendescribed with reference to the accompanying drawings, the presentdisclosure is not limited to the exemplary embodiments and may beprepared in various forms, and it will be understood by those skilled inthe art to which the present disclosure pertains that the presentdisclosure can be carried out in other detailed forms without changingthe technical spirits and essential features thereof. Therefore, itshould be understood that the exemplary embodiments described herein areillustrative and not restrictive in all aspects.

1. (canceled)
 2. The semiconductor device comprising: a critical pathmonitor (CPM) configured to monitor a clock signal provided to aprocessor; a clock manager circuit configured to perform a clockstopping for the CPM in response to receiving a first request indicatingthe processor does not want to receive the clock signal and perform aclock activating for the CPM in response to receiving a second requestindicating the processor wants to receive the clock signal; and adynamic voltage frequency scaling (DVFS) circuit configured to, controla phase lock loop (PLL) to adjust a frequency of the clock signalprovided to the processor using the CPM, and control an external deviceto adjust a voltage supplied to the processor.
 3. The semiconductordevice of claim 2, wherein the DVFS circuit adjusts the frequency of theclock signal provided to the processor using an inner loop including theCPM and the PLL.
 4. The semiconductor device of claim 2, wherein theDVFS circuit adjusts the voltage supplied to the processor using anouter loop including the CPM and the external device, wherein theexternal device includes a power management unit (PMU).
 5. Thesemiconductor device of claim 2, wherein the DVFS circuit adjusts thefrequency of the clock signal provided to the processor using an innerloop, and the voltage supplied to the processor using an outer loop, anda first operation period of the outer loop is longer than a secondoperation period of the inner loop.
 6. The semiconductor device of claim2, wherein the DVFS circuit controls the PLL to adjust the frequency ofthe clock signal provided to the processor from a first frequency to asecond frequency while controls the external device to maintain a firstvoltage supplied to the processor.
 7. The semiconductor device of claim2, wherein the DVFS circuit controls the external device to adjust thevoltage supplied to the processor from a first voltage to a secondvoltage lower than the first voltage based on the frequency of the clocksignal provided to the processor, wherein the external device includes apower management unit (PMU).
 8. The semiconductor device of claim 7,wherein the DVFS circuit controls the PMU to adjust the voltage suppliedto the processor from the second voltage to a third voltage higher thanthe second voltage in response to a voltage drop.
 9. The semiconductordevice comprising: a critical path monitor (CPM) configured to monitor aclock signal provided to a processor; a clock manager circuit configuredto perform a clock stopping for the CPM in response to receiving a firstrequest indicating the processor does not want to receive the clocksignal and perform a clock activating for the CPM in response toreceiving a second request indicating the processor wants to receive theclock signal; and a dynamic voltage frequency scaling (DVFS) circuitconfigured to, adjust a frequency of the clock signal provided to theprocessor using an inner loop, and adjust a voltage supplied to theprocessor using an outer loop, wherein a first operation period of theouter loop is longer than a second operation period of the inner loop.10. The semiconductor device of claim 9, wherein the DVFS circuitadjusts the frequency of the clock signal provided to the processor froma first frequency to a second frequency different from the firstfrequency while maintains a first voltage supplied to the processor. 11.The semiconductor device of claim 10, wherein the second frequency islower than the first frequency.
 12. The semiconductor device of claim10, wherein the inner loop includes the CPM and a phase lock loop (PLL).13. The semiconductor device of claim 12, wherein the outer loopincludes the CPM and a power management unit (PMU).
 14. Thesemiconductor device of claim 13, wherein the outer loop furtherincludes the PLL.
 15. The semiconductor device of claim 9, wherein theDVFS circuit adjusts the voltage supplied to the processor from a firstvoltage to a second voltage lower than the first voltage based on thefrequency of the clock signal provided to the processor.
 16. Thesemiconductor device of claim 15, wherein the DVFS circuit adjusts thevoltage supplied to the processor from the second voltage to a thirdvoltage higher than the second voltage in response to a voltage drop.17. The semiconductor device of claim 16, wherein the DVFS circuitadjusts the frequency of the clock signal provided to the processor froma first frequency to a second frequency higher than the first frequencyin response to the voltage drop.
 18. The semiconductor device of claim9, wherein, in response to a voltage drop, the DVFS circuit adjusts thefrequency of the clock signal provided to the processor from a firstfrequency to a second frequency higher than the first frequency, andadjusts the voltage supplied to the processor from a second voltage to asecond voltage higher than the first voltage.
 19. The semiconductorsystem comprising: a first chip; and a power management IC (PMIC)including a voltage regulator, wherein the first chip includes: acritical path monitor (CPM) configured to monitor a clock signalprovided to a processor; a clock manager circuit configured to perform aclock stopping for the CPM in response to receiving a first requestindicating the processor does not want to receive the clock signal andperform a clock activating for the CPM in response to receiving a secondrequest indicating the processor wants to receive the clock signal; anda dynamic voltage frequency scaling (DVFS) circuit configured to, adjusta frequency of the clock signal provided to the processor using an innerloop including the CPM, and adjust a voltage supplied to the processorusing an outer loop including the CPM and the voltage regulator, whereinthe DVFS circuit controls the voltage regulator to adjust the voltagesupplied to the processor from a first voltage to a second voltagedifferent from the first voltage based on the frequency of the clocksignal provided to the processor.
 20. The semiconductor system of claim19, wherein the DVFS circuit the second voltage is lower than the firstvoltage.
 21. The semiconductor system of claim 20, wherein the DVFScircuit controls the voltage regulator to adjust the voltage supplied tothe processor from the second voltage to a third voltage higher than thesecond voltage in response to a voltage drop.